Details
Length mm
98
Width mm
171
Brand
SMC
Manufacturer
SMC
Feature
High corrosion resistance to fluorine gas Minimal outgassing Minimal contamination from heavy metals Uniform baking temperature Lightweight Compact
Seal Type
Bellows Seal
Body Material
Aluminium
Actuation
Single acting
Height mm
66
Operation
Normally Closed
Series
XL2
Seal Material
FKM
Specification
SMC High Vacuum Angle Valve, SMC
Additional Variants
Product Name
Product Code
Application
Actuation
Feature
Operation
Ambient Temperature
Length mm
Height mm
Width mm
Valve Material
Actuator Working Temperature
Angle
List Price
High vacuum angle valve for semiconductor and vacuum applications
Normally Closed
–
–
–
–
–
–
–
–
–
Available to Order
High Vacuum
–
Single acting bellows seal aluminium bodied uniform baking temperature minimal outgassing high corrosion resistance to fluorine gas lightweight compact minimal contamination from heavy metals
Normally Closed Bellows Seal
–
–
–
–
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
–
Available to Order
High Vacuum
–
Single acting bellows seal aluminium bodied uniform baking temperature minimal outgassing high corrosion resistance to fluorine gas lightweight compact minimal contamination from heavy metals
Normally Closed Bellows Seal
5 to 60°C
–
–
–
–
–
–
Available to Order
–
–
–
–
–
98
66
171
–
–
–
Available to Order
–
–
–
–
–
104
66
171
–
–
–
Available to Order
–
Normally Closed
–
–
–
–
–
–
–
–
–
Available to Order
–
–
–
–
–
110
79
185
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
–
Available to Order
High vacuum applications
Single acting
Bellows seal
Normally Closed
–
–
–
–
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
–
Available to Order
High vacuum angle valve for semiconductor and vacuum applications
Normally Closed
Single acting bellows seal aluminium bodied uniform baking temperature minimal outgassing high corrosion resistance to fluorine gas lightweight compact minimal contamination from heavy metals
–
–
74
48
121
Aluminium
–
–
Available to Order
High vacuum angle valve for semiconductor and vacuum applications
–
–
Normally Closed Bellows Seal
–
–
–
–
–
–
–
Available to Order
–
Normally Closed
–
–
–
–
–
–
–
–
–
Available to Order
–
–
–
–
–
74
48
121
–
–
–
Available to Order
–
Normally Closed
–
–
–
59
38
108
–
–
–
Available to Order
High vacuum angle valve for semiconductor and vacuum applications
–
–
Normally Closed, Single Acting, Bellows Seal
–
–
–
–
–
5 to 60°C
–
Available to Order
High vacuum angle valve for semiconductor and vacuum applications
Single acting
Bellows seal
Normally Closed
5 to 60°C
60
38
108
Aluminium
–
Angle valve
Available to Order
–
–
–
–
–
–
–
–
–
–
–
Available to Order
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