Details
Length mm
74
Brand
SMC
Manufacturer
SMC
Height mm
48
Body Material
Aluminium
Width mm
121
Series
XL2
Seal Material
FKM
Specification
SMC High Vacuum Angle Valve, SMC
Additional Variants
Product Name
Product Code
Application
Actuation
Seal Type
Feature
Operation
Ambient Temperature
Width mm
Length mm
Height mm
Valve Material
Actuator Working Temperature
Angle
List Price
High vacuum angle valve for semiconductor and vacuum applications
Normally Closed
Bellows Seal
–
–
–
–
–
–
–
–
–
Available to Order
High Vacuum
–
–
Single acting bellows seal aluminium bodied uniform baking temperature minimal outgassing high corrosion resistance to fluorine gas lightweight compact minimal contamination from heavy metals
Normally Closed Bellows Seal
–
–
–
–
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
–
–
Available to Order
High Vacuum
–
–
Single acting bellows seal aluminium bodied uniform baking temperature minimal outgassing high corrosion resistance to fluorine gas lightweight compact minimal contamination from heavy metals
Normally Closed Bellows Seal
5 to 60°C
–
–
–
–
–
–
Available to Order
–
–
–
–
–
–
171
98
66
–
–
–
Available to Order
–
–
–
–
–
–
171
104
66
–
–
–
Available to Order
–
Normally Closed
–
–
–
–
–
–
–
–
–
–
Available to Order
–
–
–
–
–
–
185
110
79
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
–
–
Available to Order
High vacuum applications
Single acting
–
Bellows seal
Normally Closed
–
–
–
–
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
–
–
Available to Order
High vacuum angle valve for semiconductor and vacuum applications
Normally Closed
Bellows Seal
Single acting bellows seal aluminium bodied uniform baking temperature minimal outgassing high corrosion resistance to fluorine gas lightweight compact minimal contamination from heavy metals
–
–
121
74
48
Aluminium
–
–
Available to Order
High vacuum angle valve for semiconductor and vacuum applications
–
–
–
Normally Closed Bellows Seal
–
–
–
–
–
–
–
Available to Order
–
Normally Closed
–
–
–
–
–
–
–
–
–
–
Available to Order
–
Normally Closed
–
–
–
–
108
59
38
–
–
–
Available to Order
High vacuum angle valve for semiconductor and vacuum applications
–
–
–
Normally Closed, Single Acting, Bellows Seal
–
–
–
–
–
5 to 60°C
–
Available to Order
High vacuum angle valve for semiconductor and vacuum applications
Single acting
–
Bellows seal
Normally Closed
5 to 60°C
108
60
38
Aluminium
–
Angle valve
Available to Order
–
–
–
–
–
–
–
–
–
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
–
–
Available to Order
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