Details
Length mm
74
Feature
Single acting bellows seal aluminium bodied uniform baking temperature minimal outgassing high corrosion resistance to fluorine gas lightweight compact minimal contamination from heavy metals
Brand
SMC
Manufacturer
SMC
Actuation
Normally Closed
Seal Type
Bellows Seal
Height mm
48
Body Material
Aluminium
Application
High vacuum angle valve for semiconductor and vacuum applications
Width mm
121
Valve Material
Aluminium
Series
XL2
Seal Material
FKM
Specification
SMC High Vacuum Angle Valve, SMC
Additional Variants
Product Name
Product Code
Application
Operation
Ambient Temperature
Width mm
Length mm
Height mm
Actuation
Feature
Actuator Working Temperature
Angle
List Price
High vacuum angle valve for semiconductor and vacuum applications
–
–
–
–
–
Normally Closed
–
–
–
Available to Order
High Vacuum
Normally Closed Bellows Seal
–
–
–
–
–
Single acting bellows seal aluminium bodied uniform baking temperature minimal outgassing high corrosion resistance to fluorine gas lightweight compact minimal contamination from heavy metals
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
Available to Order
High Vacuum
Normally Closed Bellows Seal
5 to 60°C
–
–
–
–
Single acting bellows seal aluminium bodied uniform baking temperature minimal outgassing high corrosion resistance to fluorine gas lightweight compact minimal contamination from heavy metals
–
–
Available to Order
–
–
–
171
98
66
–
–
–
–
Available to Order
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–
–
171
104
66
–
–
–
–
Available to Order
–
–
–
–
–
–
Normally Closed
–
–
–
Available to Order
–
–
–
185
110
79
–
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
Available to Order
High vacuum applications
Normally Closed
–
–
–
–
Single acting
Bellows seal
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
Available to Order
High vacuum angle valve for semiconductor and vacuum applications
Normally Closed Bellows Seal
–
–
–
–
–
–
–
–
Available to Order
–
–
–
–
–
–
Normally Closed
–
–
–
Available to Order
–
–
–
121
74
48
–
–
–
–
Available to Order
–
–
–
108
59
38
Normally Closed
–
–
–
Available to Order
High vacuum angle valve for semiconductor and vacuum applications
Normally Closed, Single Acting, Bellows Seal
–
–
–
–
–
–
5 to 60°C
–
Available to Order
High vacuum angle valve for semiconductor and vacuum applications
Normally Closed
5 to 60°C
108
60
38
Single acting
Bellows seal
–
Angle valve
Available to Order
–
–
–
–
–
–
–
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
Available to Order
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