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SMC High Vacuum Angle Valve
Product Code: XLA-16-2M9//XF1AManufacturer Code: XLA-16-2M9//-XF1A- Buy Price(exc VAT)
tech sheet
Details
Brand
SMC
Manufacturer
SMC
Specification
SMC High Vacuum Angle Valve, SMC
Additional Variants
Product Name
Product Code
Seal Material
Application
Series
Actuation
Seal Type
Body Material
Feature
Operation
Ambient Temperature
Width mm
Length mm
Height mm
Valve Material
Actuator Working Temperature
Angle
List Price
FKM
High vacuum angle valve for semiconductor and vacuum applications
XL2
Normally Closed
Bellows Seal
Aluminium
–
–
–
–
–
–
–
–
–
Available to Order
FKM
High Vacuum
XL2
–
–
Aluminium
Single acting bellows seal aluminium bodied uniform baking temperature minimal outgassing high corrosion resistance to fluorine gas lightweight compact minimal contamination from heavy metals
Normally Closed Bellows Seal
–
–
–
–
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
–
–
–
–
–
Available to Order
FKM
High Vacuum
XL2
–
–
Aluminium
Single acting bellows seal aluminium bodied uniform baking temperature minimal outgassing high corrosion resistance to fluorine gas lightweight compact minimal contamination from heavy metals
Normally Closed Bellows Seal
5 to 60°C
–
–
–
–
–
–
Available to Order
FKM
–
XL2
–
–
Aluminium
–
–
–
171
98
66
–
–
–
Available to Order
FKM
–
XL2
–
–
Aluminium
–
–
–
171
104
66
–
–
–
Available to Order
FKM
–
XL2
Normally Closed
–
Aluminium
–
–
–
–
–
–
–
–
–
Available to Order
FKM
–
XL2
–
–
Aluminium
–
–
–
185
110
79
–
–
–
Available to Order
FKM
–
XL2
–
–
Aluminium
–
–
–
–
–
–
–
–
–
Available to Order
FKM
High vacuum applications
XL2
Single acting
–
Aluminium
Bellows seal
Normally Closed
–
–
–
–
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
–
–
–
–
–
Available to Order
FKM
High vacuum angle valve for semiconductor and vacuum applications
XL2
Normally Closed
Bellows Seal
Aluminium
Single acting bellows seal aluminium bodied uniform baking temperature minimal outgassing high corrosion resistance to fluorine gas lightweight compact minimal contamination from heavy metals
–
–
121
74
48
Aluminium
–
–
Available to Order
FKM
High vacuum angle valve for semiconductor and vacuum applications
XL2
–
–
Aluminium
–
Normally Closed Bellows Seal
–
–
–
–
–
–
–
Available to Order
FKM
–
XL2
Normally Closed
–
Aluminium
–
–
–
–
–
–
–
–
–
Available to Order
FKM
–
XL2
–
–
Aluminium
–
–
–
121
74
48
–
–
–
Available to Order
FKM
–
XL2
Normally Closed
–
Aluminium
–
–
–
108
59
38
–
–
–
Available to Order
FKM
High vacuum angle valve for semiconductor and vacuum applications
XL2
–
–
Aluminium
–
Normally Closed, Single Acting, Bellows Seal
–
–
–
–
–
5 to 60°C
–
Available to Order
FKM
High vacuum angle valve for semiconductor and vacuum applications
XL2
Single acting
–
Aluminium
Bellows seal
Normally Closed
5 to 60°C
108
60
38
Aluminium
–
Angle valve
Available to Order
–
–
–
–
–
–
–
–
–
–
–
–
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
–
–
–
–
–
Available to Order