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SMC High Vacuum Angle Valve
Product Code: XLA-16-2M9//- Buy Price(exc VAT)
tech sheet
Details
Length mm
59
Height mm
38
Brand
SMC
Manufacturer
SMC
Actuation
Normally Closed
Width mm
108
Body Material
Aluminium
Series
XL2
Seal Material
FKM
Specification
SMC High Vacuum Angle Valve, SMC
Additional Variants
Product Name
Product Code
Application
Seal Type
Feature
Operation
Ambient Temperature
Width mm
Length mm
Height mm
Actuation
Valve Material
Actuator Working Temperature
Angle
List Price
High vacuum angle valve for semiconductor and vacuum applications
Bellows Seal
–
–
–
–
–
–
Normally Closed
–
–
–
Available to Order
High Vacuum
–
Single acting bellows seal aluminium bodied uniform baking temperature minimal outgassing high corrosion resistance to fluorine gas lightweight compact minimal contamination from heavy metals
Normally Closed Bellows Seal
–
–
–
–
–
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
–
–
Available to Order
High Vacuum
–
Single acting bellows seal aluminium bodied uniform baking temperature minimal outgassing high corrosion resistance to fluorine gas lightweight compact minimal contamination from heavy metals
Normally Closed Bellows Seal
5 to 60°C
–
–
–
–
–
–
–
Available to Order
–
–
–
–
–
171
98
66
–
–
–
–
Available to Order
–
–
–
–
–
171
104
66
–
–
–
–
Available to Order
–
–
–
–
–
–
–
–
Normally Closed
–
–
–
Available to Order
–
–
–
–
–
185
110
79
–
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
–
–
Available to Order
High vacuum applications
–
Bellows seal
Normally Closed
–
–
–
–
Single acting
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
–
–
Available to Order
High vacuum angle valve for semiconductor and vacuum applications
Bellows Seal
Single acting bellows seal aluminium bodied uniform baking temperature minimal outgassing high corrosion resistance to fluorine gas lightweight compact minimal contamination from heavy metals
–
–
121
74
48
Normally Closed
Aluminium
–
–
Available to Order
High vacuum angle valve for semiconductor and vacuum applications
–
–
Normally Closed Bellows Seal
–
–
–
–
–
–
–
–
Available to Order
–
–
–
–
–
–
–
–
Normally Closed
–
–
–
Available to Order
–
–
–
–
–
121
74
48
–
–
–
–
Available to Order
High vacuum angle valve for semiconductor and vacuum applications
–
–
Normally Closed, Single Acting, Bellows Seal
–
–
–
–
–
–
5 to 60°C
–
Available to Order
High vacuum angle valve for semiconductor and vacuum applications
–
Bellows seal
Normally Closed
5 to 60°C
108
60
38
Single acting
Aluminium
–
Angle valve
Available to Order
–
–
–
–
–
–
–
–
–
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
–
–
Available to Order