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SMC High Vacuum Angle Valve
Product Code: XLA-63-2M9//- Buy Price(exc VAT)
tech sheet
Details
Operation
Normally Closed, Single Acting, Bellows Seal
Brand
SMC
Manufacturer
SMC
Actuator Working Temperature
5 to 60°C
Body Material
Aluminium
Application
High vacuum angle valve for semiconductor and vacuum applications
Series
XL2
Seal Material
FKM
Specification
SMC High Vacuum Angle Valve, SMC
Additional Variants
Product Name
Product Code
Actuation
Seal Type
Feature
Application
Operation
Ambient Temperature
Width mm
Length mm
Height mm
Valve Material
Angle
List Price
Normally Closed
Bellows Seal
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High vacuum angle valve for semiconductor and vacuum applications
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Available to Order
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Single acting bellows seal aluminium bodied uniform baking temperature minimal outgassing high corrosion resistance to fluorine gas lightweight compact minimal contamination from heavy metals
High Vacuum
Normally Closed Bellows Seal
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Available to Order
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Available to Order
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Single acting bellows seal aluminium bodied uniform baking temperature minimal outgassing high corrosion resistance to fluorine gas lightweight compact minimal contamination from heavy metals
High Vacuum
Normally Closed Bellows Seal
5 to 60°C
–
–
–
–
–
Available to Order
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171
98
66
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Available to Order
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171
104
66
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Available to Order
Normally Closed
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Available to Order
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185
110
79
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Available to Order
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Available to Order
Single acting
–
Bellows seal
High vacuum applications
Normally Closed
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Available to Order
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Available to Order
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Available to Order
Normally Closed
Bellows Seal
Single acting bellows seal aluminium bodied uniform baking temperature minimal outgassing high corrosion resistance to fluorine gas lightweight compact minimal contamination from heavy metals
High vacuum angle valve for semiconductor and vacuum applications
–
–
121
74
48
Aluminium
–
Available to Order
–
–
–
High vacuum angle valve for semiconductor and vacuum applications
Normally Closed Bellows Seal
–
–
–
–
–
–
Available to Order
Normally Closed
–
–
–
–
–
–
–
–
–
–
Available to Order
–
–
–
–
–
–
121
74
48
–
–
Available to Order
Normally Closed
–
–
–
–
–
108
59
38
–
–
Available to Order
Single acting
–
Bellows seal
High vacuum angle valve for semiconductor and vacuum applications
Normally Closed
5 to 60°C
108
60
38
Aluminium
Angle valve
Available to Order
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Available to Order
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Available to Order