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SMC High Vacuum Angle Valve
Product Code: XLA-16G-2-XF1A- Buy Price(exc VAT)
tech sheet
Details
Application
High vacuum applications requiring minimal contamination and corrosion resistance
Angle
Angle valve
Brand
SMC
Flange Specification
KF NW
Manufacturer
SMC
Seal Type
Bellows Seal
Body Material
Aluminium
Actuation
Single acting
Feature
Uniform baking temperature Minimal outgassing High corrosion resistance to fluorine gas Lightweight Compact Minimal contamination from heavy metals
Operation
Normally Closed
Series
XL2
Seal Material
FKM
Specification
SMC High Vacuum Angle Valve, SMC
Additional Variants
Product Name
Product Code
Application
Actuation
Feature
Operation
Ambient Temperature
Width mm
Length mm
Height mm
Valve Material
Actuator Working Temperature
List Price
High vacuum angle valve for semiconductor and vacuum applications
Normally Closed
–
–
–
–
–
–
–
–
Available to Order
High Vacuum
–
Single acting bellows seal aluminium bodied uniform baking temperature minimal outgassing high corrosion resistance to fluorine gas lightweight compact minimal contamination from heavy metals
Normally Closed Bellows Seal
–
–
–
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
Available to Order
High Vacuum
–
Single acting bellows seal aluminium bodied uniform baking temperature minimal outgassing high corrosion resistance to fluorine gas lightweight compact minimal contamination from heavy metals
Normally Closed Bellows Seal
5 to 60°C
–
–
–
–
–
Available to Order
–
–
–
–
–
171
98
66
–
–
Available to Order
–
–
–
–
–
171
104
66
–
–
Available to Order
–
Normally Closed
–
–
–
–
–
–
–
–
Available to Order
–
–
–
–
–
185
110
79
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
Available to Order
High vacuum applications
Single acting
Bellows seal
Normally Closed
–
–
–
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
Available to Order
High vacuum angle valve for semiconductor and vacuum applications
Normally Closed
Single acting bellows seal aluminium bodied uniform baking temperature minimal outgassing high corrosion resistance to fluorine gas lightweight compact minimal contamination from heavy metals
–
–
121
74
48
Aluminium
–
Available to Order
High vacuum angle valve for semiconductor and vacuum applications
–
–
Normally Closed Bellows Seal
–
–
–
–
–
–
Available to Order
–
Normally Closed
–
–
–
–
–
–
–
–
Available to Order
–
–
–
–
–
121
74
48
–
–
Available to Order
–
Normally Closed
–
–
–
108
59
38
–
–
Available to Order
High vacuum angle valve for semiconductor and vacuum applications
–
–
Normally Closed, Single Acting, Bellows Seal
–
–
–
–
–
5 to 60°C
Available to Order
High vacuum angle valve for semiconductor and vacuum applications
Single acting
Bellows seal
Normally Closed
5 to 60°C
108
60
38
Aluminium
–
Available to Order
–
–
–
–
–
–
–
–
–
–
Available to Order